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La2Zr2O7(LZO)氧化物被认为是一种良好的涂层导体用缓冲层材料.本文对采用化学溶液沉积技术制备具有单一c轴取向的La2Zr2O7(LZO)膜的热处理参数的影响进行了研究.研究结果显示在前驱膜热解过程中控制气流速度十分关键,大气流速度有利于获得具有单一c轴取向的LZO膜.对前驱膜热解过程的气体流动情况进行良好的控制可以在很宽泛的热处理条件下制备出具有单一取向的LZO膜.

It is believe that the La2Zr2O7(LZO) film is a good buffer layer for coated conductors.In this paper,the effect of heat-treatment parameters on the orientation of LZO films deposited by chemical solution deposition was studied.Results showed that controlling the gas flow speed was a key to obtain c-axis oriented LZO films,and a large gas flow speed was benefit for depositing c-axis oriented LZO films by chemical solution deposition process.Well-oriented LZO films can be obtained in a large heat-treatment parameters window if the gas flow speed was controlled.

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