采用电弧离子镀制备不同氧含量的Cr-Al-Si-O-N涂层,研究氧含量对纳米复合涂层的组织结构和力学性能的影响.结果表明:随着氧氮流量比从0增加到25％时,涂层中的氧含量从0增加到51.8％(摩尔分数),而氮含量从33.5％逐渐减少到9.8％;CrAlSiON涂层主要以面心立方结构的(Cr,Al)N固溶体形式存在,其择优取向为(111)和(200).随着氧含量的增加,涂层的硬度呈先增加后减小的趋势;当氧氮流量比为10％时,硬度达到最大值3349HK.由于氧化物的存在,含氧涂层在高温高速的摩擦中表现出优异的性能,具有较低的摩擦因数.
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