使用减反射膜层是提高太阳电池短路电流密度进而提高电池转换效率的有效手段之一.针对CdTe薄膜太阳电池的光谱响应范围,基于AM1.5辐照光谱,优化设计了MgF2/H4/Al2O3结构的减反射薄膜,使用电子束蒸发技术制备了该减反射膜,使用椭圆偏振仪、紫外/可见分光光度计、原子力显微镜分别测量了所制备薄膜的光学性质和表面形貌,对比分析了膜系结构理论模拟与实验测量结果.结果表明,使用该减反射薄膜后,电池的量子效率提高了7.3％；光电转换效率从12.5％提高到13.3％.
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