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BaTiO3 films were epitaxially grown on SrTiO3 (001) substrates buffered with SrRuO3 films as bottom electrode by pulsed laser deposition under high oxygen pressure of 30 Pa. The quality of the BaTiO3/SrRuO3/SrTiO3 multilayer films was analyzed by means of X-ray diffraction, atomic force microscopy and transmission electron microscopy. BaTiO3 films were found to be highly c-axis-oriented tetragonal phase with c/a = 1.002. The dielectric constant first increased with increasing temperature, and showed a peak at the Curie temperature of about 356 K. The films had well-saturated hysteresis loops with a remnant polarization of 7.3 mu C/cm(2) and a coercive field of 29.5 kV/cm at room temperature. (C) 2011 Elsevier B.V. All rights reserved.