为避免A12O3陶瓷/Kovar接头裂纹的产生,在Kovar表面磁控溅射金属Mo,并使用Ti-Cu-Ni活性钎料进行钎焊试验.通过扫描电镜和能谱对界面微观组织和成分进行了分析.结果表明,当溅射钼中间层的厚度为14.2μm时,在A12O3/Kovar界面处,Mo中间层可阻碍Kovar中Fe元素与钎料中Ti元素相互反应产生脆性FexTiy金属间化合物,防止了界面处裂纹的生成.
In order to avoid the formation of cracks at Al2O3/Kovar joint,Mo was coated on the Kovar surface by Magnetron sputtering method.Meantime.Ti-Cu-Ni active filler metal was employed to braze Al2O3 and Kovar.The interfacial microstructure and element distribution were analyzed by SEM and EDS methods.It can be found that the cracks were avoided when the Mo layer was 14.2 μn in thickness.Meanwhile.the results also show that Mo interlayer decreased the reaction rate between Fe element from the base material and Ti element from the filler metal.That is,fewer Fextiy intermetallic compounds were formed at the interface,and therefore the formation of cracks at the reaction interface were suppressed.
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