采用溶胶-凝胶工艺制备了Bi4-xLaxTi3O12和Bi4Ti3-yNbyO12铁电薄膜,研究了La、Nb掺杂对薄膜介电性能和C-V特性的影响.研究表明,在x<0.75、y<0.06范围内,随La、Nb掺杂量的增加, Bi4-xLaxTi3O12和Bi4Ti3-yNbyO12薄膜的介电常数和C-V特性曲线回滞窗口增大,介电损耗和漏电流密度减小.x>0.5时,Bi4-xLaxTi3O12薄膜可获得大于1.8 V的C-V回滞窗口,且经1010极化开关后其回滞窗口的减小未超过6%;而Nb掺杂对增大Bi4Ti3-yNbyO12薄膜C-V回滞窗口的作用更加明显,但经1010极化开关后,其回滞窗口的减小较为明显,并出现一定平移.
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