本工作根据要研制一种纯物理吸附表面的设想，研究了用溶胶法制备的Cu、Zn、Fe、Sb和Ti等的硫化物系薄膜的感湿特性，发现硫化物系薄膜具有感湿灵敏度高、滞后小、响应快等优点，其中离子的电荷-半径比大的金属硫化物湿敏元件具有特别好的长期稳定性;与预期的结果一致.
Film Humidity sensors of Cu, Zn, Fe, Sb, Ti and so on sulfide systenis were prepared by the Sol-gel mcthod aceording to the idea of developing a kind of pure physisorbed surface (without chemisorption). It was found that the filmhumidity sensors of sulfide systems possess the properties of high sensitivity, small hysterisis, and rapid responsc, and the sensors made of sulfide films of metal cations with Large charge-radius ratio have all excellent durability, these agree with our cxpectant results.
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