采用水热法结合溶胶-凝胶法在SiO2基片上制备了不同Al含量掺杂的ZnO纳米棒阵列.通过X射线衍射仪(XRD),电子扫描显微镜(SEM),透射光谱和光致发光光谱仪(PL)等测量手段,分析了Zn1-xAlxO薄膜样品的微结构、表面形貌、透射及光致发光特性.结果表明,制备出的Zn1-xAlxO薄膜具有良好的结晶质量和明显的沿(002)方向择优取向生长.透射谱分析显示,样品的吸收边随Al含量的增加出现明显的红移现象.PL谱分析表明,掺杂Al以后,薄膜出现强的橙红光发射光谱带,通过谱线拟合,发现在可见光波段的缺陷发光主要是位于能量为1.92eV和2.15 eV的红光及黄光发射,主要发光机理为Zn,缺陷发射.
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