SiN薄膜因为具有良好的减反射性质和钝化作用,已经越来越广泛地应用于多晶硅太阳电池的制造工艺中.介绍了SiN薄膜在硅太阳电池中的性质,制备方法等研究现状,同时提出了存在的问题并展望了今后的发展趋势.
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