研制了具有电阻率和压电系数梯度的PZT/ZnO压电陶瓷,其本身也是一类独石型梯度功能压电陶瓷驱动器(FGMPA),并且它所需的驱动电场比La-PZT/Fe-PZT FGMPA低.分别用电子探针(EPMA)、X衍射(XRD)和扫描电镜(SEM)查证了其组分、相结构和显微结构的梯度分布.结果表明,显微结构及电性能的梯度分布,主要是由Zn2+的扩散及其在PZT晶界富集造成的,它也是使PZT层中与界面相邻的部分区域电阻率下降的原因.XRD证实了在PZT层中ZnO第二相的存在.
La-PZT/Al-ZnO piezoelectric ceramics with gradients of resistivity and piezoelectric modulus
were fabricated by using a powder metallurgical process. They are a kind of monolithic Piezoelectric Actuator with Functional Gradients (FGMPA),
which can effectively reduce or smooth its interfacial stress concentration and requires much lower driving field than that of La-PZT/Fe-PZT FGMPA.
The distributions of composition, phase and microstructure were examined respectively by using electron probe microanalysis (EPMA), X-ray Diffraction
(XRD) and scanning electron microscopy (SEM). Results show that the gradient distributions of structural and electrical properties are mainly caused by
the diffusion and aggregation of Zn ions in the PZT layer. It is also the main cause of reducing the resistivity in partial gradient PZT region
adjacent to ZnO layer. The existence of ZnO in the PZT region as a second phase was detected by XRD.
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