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研究了铝板表面前处理以及阳极氧化过程中电解液温度对阳极氧化膜层抗热冲击性能的影响,并分析了影响机理.选择合适的前处理及阳极氧化工艺参数,可以制备具有优良性能的"理想"绝缘金属基板,其阳极氧化绝缘层的电阻率大于1013Ω·cm,击穿电压大于600 V,并且能够抵抗400℃热冲击.采用化学镀铜结合电镀铜工艺对基板进行金属化布线后,"理想"绝缘金属基板被应用于BGA封装中.

参考文献

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