利用磁控溅射技术在高速钢和单晶硅基体上沉积CrTiAlN梯度镀层,研究Ti靶电流对CrTiAlN镀层组织、相结构及硬度的影响.利用EDS、XRD和SEM分析镀层的成分、相结构及形貌,采用显微硬度计测量镀层的硬度.结果表明:随着Ti靶电流的增大,镀层中的Ti原子逐渐置换CrN中的Cr原子形成Cr-Ti-N体系,同时出现少量的TiN相;镀层生长的择优取向由(111)晶面逐渐转变为(200)晶面;镀层柱状晶的结构更为致密,其表面形貌由三棱锥结构逐步变为胞状结构;随Ti靶电流的增大,镀层硬度逐渐由1267HV升至1876HV.
Effect of Ti target current on microstructure, phase structure and hardness of CrTiAliN coatings, which was deposited on high speed steel and silicon wafer substrate by magnetron sputtering, were studied. The composition, phases, morphology of the CrTiAlN coatings were analyzed and observed by EDS, XRD and SEM. Hardness of the coatings was measured by a micro-hardness tester. The results show that with the increase of Ti target current, Ti is gradually substituted for Cr in CrN to form CrTiAlN coatings, which consists of CrN and a small quantity of TiN phase.The preferential orientation of the coatings changes from (111) plane to (200) plane. The surface morphology of the coatings gradually changes from triangular pyramid structure to compacted cellular structure. Hardness of the coatings is improved from 1267HV to 1876HV with the increase of Ti target current.
参考文献
| [1] | 吴大维,刘传胜,傅德君,彭友贵,范湘军.刀具涂层技术的新进展[J].中国机械工程,2000(05):574-576. |
| [2] | Samir K;Khrais;Lin Y J .Wear mechanisms and tool performance of TiAlN PVD coated inserts during machining of AIS1 4140 steel[J].Wear,2007,262:64-69. |
| [3] | Fernandes C;Carvalho S;Rebouta L;Vaz F;Denannot MF;Pacaud J;Riviere JP;Cavaleiro A .Effect of the microstructure on the cutting performance of superhard (Ti,Si,Al)N nanocomposite films[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2008(12):1470-1474. |
| [4] | YANG Shi-cai;Eric Wiemann;Teer D G .Hie properties and performance of Cr-based multilayer nitride hard coatings using unbalanced magnetron sputtering and elemental metal targets[J].Surface and Coatings Technology,2004,188-189:662-668. |
| [5] | Ding XZ;Zeng XT;Liu YC;Fang FZ;Lim GC .Cr1-xAlxN coatings deposited by lateral rotating cathode arc for high speed machining applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(8):1710-1715. |
| [6] | Lugscheider E.;Bobzin K.;Lackner K. .Investigations of mechanical and tribological properties of CrAlN+C thin coatings deposited on cutting tools[J].Surface & Coatings Technology,2003(0):681-686. |
| [7] | 肖继明,李言,白力静,袁启龙,郑建明.CrAlTiN涂层高速钢刀具的切削性能和磨损特性[J].材料热处理学报,2005(06):117-121. |
| [8] | 白力静,蒋百灵,肖继明,文晓斌,李玉庆.CrTiAlN镀层对M2基高速钢切削性能的影响[J].材料研究学报,2006(01):54-58. |
| [9] | Harris S G;Doyle E D;Vlasveld A C et al.A study of the wear mechanisms of Ti_(1-x)Al_xN and Ti_(1-x-y)Al_xCr_yN coated high-speed steel twist drills under dry machining conditions[J].Wear,2003,254:723-734. |
| [10] | Kutschej K;Mayrhofer PH;Kathrein M;Polcik P;Mitterer C .A new low-friction concept for Ti1-xAlxN based coatings in high-temperature applications[J].Surface & Coatings Technology,2004(0):358-363. |
| [11] | 张雅婷,徐章程,李菲晖.Si基上电沉积Cu薄膜的形貌与择优取向[J].人工晶体学报,2006(04):728-731. |
| [12] | 程丙勋 .磁控溅射制备Al膜和Cu膜的结构与性能研究[D].四川大学,2007. |
| [13] | Catherine M;Cotell;James K et al.Effect of ion energy on the mechanical properties of ion beam assisted deposition (IBAD) wear resistant coatings[J].Surface and Coatings Technology,1996,81(01):118-125. |
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