金刚石具有优异的物理化学性能,在很多领域的应用前景十分诱人.用化学气相沉积(CVD)法实现高沉积速率、高质量、大面积金刚石单晶的制备成为了当今研究的一个热点.本文综述了影响微波等离子体化学气相沉积法制备单晶金刚石的工艺参数,并简单介绍了国内外在单晶金刚石制备上的进展,最后对CVD金刚石单晶的应用前景进行了展望.
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