综述了透明导电氧化物(TCO)薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展.ITO薄膜性能优异,是重要的平面显示器件用材料.掺铝ZnO薄膜价格低廉,是极具开发前景的ITO薄膜的替代材料.柔性衬底氧化物半导体透明导电薄膜的开发和应用将扩大TCO薄膜的应用领域.
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