采用溶胶-凝胶结合旋涂技术在玻璃基底上制备了SnO2∶Sb/SiO2复合薄膜,利用XRD、FT-IR、SEM、椭偏仪、分光光度计等方法对薄膜样品进行了系统地表征.结果表明:经过热处理后样品生成了SnO2∶Sb和SiO2∶薄膜具有双层结构,上层SiO2厚度约105nm,折射率为1.352,底层SnO2∶Sb厚度约1200 nm,折射率为1.91;优化工艺条件下SnO2∶ Sb/SiO2复合薄膜的性能优于SnO2∶ Sb薄膜,在相同情况下SnO2∶ Sb/SiO2复合薄膜对可见光的透过率大于SnO2∶Sb薄膜,这是因为上层SiO2薄膜折射率较低,与底层高折射率SnO2∶ Sb薄膜共同构成减反射膜系,提高了膜系的可见光透过率.相比于单层SnO2∶ Sb膜,在可见光部分增透率大于4.5%,近红外波段的增透率小于1.0%,基本保持原有导电膜的低红外辐射特性,并提高了可见光透过率.
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