利用三维动态蒙特卡洛模型模拟了Si基底上沉积Ti薄膜的初始期间的生长特性.模拟结果发现,在扩散截止步长为50的情况下,沉积温度和沉积速率对Ti薄膜初始生长模式和表面形貌有明显的影响.模拟结果表明,随着沉积温度的增加,Ti薄膜的初始晶核尺寸越来越大,数目越来越少,趋于岛状生长模式,同时Ti薄膜的相对密度越来越大,薄膜表面粗糙度也越来越小,即:较高的温度有利于Ti薄膜的岛状生长.随着沉积速率的增大,Ti薄膜表面越来越粗糙,相对密度也越来越小；较大的沉积速率不利于Ti薄膜的生长.
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