采用中频磁控溅射法制备不同厚度的Al膜。利用直线型四探针法测量不同厚度Al膜的电导率，研究薄膜直流电导率随厚度的变化关系（尺寸效应）；并利用网络矢量分析仪测量Al膜与FR4-epoxy环氧树脂玻璃板复合结构微波吸收率，研究电导率尺寸效应对Al膜微波吸收性能的影响。实验结果表明：薄膜厚度对金属Al膜的电导率产生主要影响；在Al膜和FR4-epoxy环氧树脂玻璃板复合结构中，Al膜电导率变化对复合结构的最大吸收峰值以及吸收峰值对应的Al膜厚度会产生显著影响。实验结果利用传输矩阵方法计算得到了验证。
Thin Aluminum films with different thickness were deposited on PET substrate by Mid-frequency Magnetron Sputtering (MFMS). The DC conductivity of these thin films was measured using linear four probe method. The microwave absorption properties of the Al-FR4 epoxy layered structure were characterized by vector network analyzer. The results indicated that the size effect on conductivity have a pronounced influence on microwave absorption properties of the thin aluminum film, which were verified by theoretical calculation with transfer matrix method.
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