采用电子束蒸发法以普通玻璃为基板制备了重掺硅薄膜,通过SEM、EDS、透射光谱对其形貌、成分以及透射率进行了测试表征.进一步采用铝诱导低温晶化法在玻璃基板上沉积Al薄膜,对重掺硅薄膜进行铝诱导晶化.XRD测试、电学性能测试以及可见-红外光谱透射率测试结果表明,硅薄膜在温度为300℃以上出现了Si(111)的衍射峰,薄膜的导电性得到了提高,且具有较强的红外反射能力,表明在低辐射玻璃上具有一定的应用价值.同时采用电子束蒸发法制备了结构为glass/Si/Ag/Si的Ag基低辐射玻璃,通过光学性质测试和腐蚀情况观察结果表明硅薄膜具有保护低辐射薄膜的作用.
参考文献
| [1] | R.H. Buitrago;G.A. Risso;M. Cutrera;M. Battioni;L. De Bernardez;J.A. Schmidt;R.D. Arce;R.R. Koropecki .Polycrystalline silicon thin film solar cells prepared by PECVD-SPC[J].International journal of hydrogen energy,2008(13):3522-3525. |
| [2] | Aida M S;Bachiri R .The surface properties of sputtered amorphous silicon thin films[J].Journal of Non-Crystalline Solids,1995,189:167-172. |
| [3] | SeJinPark;Eunjoo Lee;HyoSangjeon;SeJin Ahn;Min-KyuOh;ByoungKounMin .A comparative study of solution based CIGS thin film growth on different glass substrates[J].Applied Surface Science,2011(1):120-125. |
| [4] | Miyazaki M;Ando E .Durability improvement of Agbased low-emissivity coatings[J].Journal of Non-Crystalline Solids,1994,178:245-249. |
| [5] | Shuiping Huang;Zhanshan Wang;Jian Xu;Li Wang;Daxue Lu;Tongsuo Yuan .Simulation Of The Spectra And Determination Of The Optical Constants Of Online Low-emission Glass From Visible To Mid-infrared Region[J].Thin Solid Films,2009(9):2963-2967. |
| [6] | In Soo Kim;Eun-Kyung Jeong;Do Yun Kim;Manoj Kumar;Se-Young Choi .Investigation Of P-type Behavior In Ag-doped Zno Thin Films By E-beam Evaporation[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2009(7):4011-4014. |
| [7] | Becker C;Sontheimer T;Steffens S et al.Polycrystalline silicon thin films by high-rate electron-beam evaporation for photovoltaic applications-Influence of substrate texture and temperature[J].Energy Procedia,2011,10:61-65. |
| [8] | Zhang, Y;Wu, YF;Chen, M;Wu, LM .Fabrication method of TiO2-SiO2 hybrid capsules and their UV-protective property[J].Colloids and Surfaces, A. Physicochemical and Engineering Aspects,2010(2/3):216-225. |
| [9] | H.K. Lee;J.W. Kim;S.J. Park;S.Y. Choi .Effects of SiO2 addition on discharge characteristics of the MgO protective layer in plasma display panel[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(12):5113-5117. |
| [10] | I. Gordon;L. Carnel;D. Van Gestel;G. Beaucarne;J. Poortmans .Fabrication and characterization of highly efficient thin-film polycrystalline-silicon solar cells based on aluminium-induced crystallization[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(20):6984-6988. |
| [11] | Ozgenc Ebil;Roger Aparicio;Robert Birkmire .Aluminum-induced crystallization of amorphous silicon films deposited by hot wire chemical vapor deposition on glass substrates[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2010(1):178-183. |
| [12] | Kato, K.;Omoto, H.;Tomioka, T.;Takamatsu, A. .Visible and near infrared light absorbance of Ag thin films deposited on ZnO under layers by magnetron sputtering[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2011(8):2352-2356. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%