ZnO and In203 films were prepared by thermal oxidation of vacuum deposited zinc and indium films, respec- tively onto the glass substrate at 30 ℃. The fabricated films have been irradiated with 100-MeV Ni7＋ ions at different fluences ranging from 5×1011 to 5×1013 ions/cm2. The structural and gas sensing properties of pristine and irradiated films have been discussed. X-ray diffraction （XRD） pattern of pristine and irradiated films reveal that the films are polycrystalline in nature and crystallinity increases after irradiation. In this study, highly porous In203 nanorods evolved when being irradiated at a fluence of 5×1013 ions/cm2 while ZnO film shows decrease in number of nanowires. The ammonia sensing performance of the Ni^7＋ irradiated In203 films shows an improvement as compared to its pristine counterpart.
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