介绍了微弧氧化法的基本原理和工艺过程；综述了微弧氧化法制备铁电薄膜的发展历程及最新研究进展；讨论了目前微弧氧化制备铁电薄膜过程中存在的主要问题；提出了合理选择溶液体系和溶液浓度,研究工艺参数对薄膜表面形貌和铁电、介电性能的影响,提高薄膜表面质量是促进微弧氧化制备铁电薄膜技术发展的关键.
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