ZrN/WN纳米多层膜的结构与性能研究

功能材料, 2006, 37(8): 1325-1330.

ZrN/WN纳米多层膜的结构与性能研究

王明霞 ^1, , 张晶晶 ^2, , 杨瑾 ^3, , 刘谦祥 ^4, , 李德军 ^5,

1.天津师范大学,物理与电子信息学院,天津,300074

2.天津师范大学,物理与电子信息学院,天津,300074

3.天津师范大学,物理与电子信息学院,天津,300074

4.天津师范大学,物理与电子信息学院,天津,300074

5.天津师范大学,物理与电子信息学院,天津,300074

基金项目: 国家自然科学基金(50472026) 天津市应用基础研究项目(043801011)

关键词：射频磁控溅射 , ZrN/WN纳米多层膜 , 调制周期

Structure and property of nanoscale ZrN/WN multilayered coatings

选择锆和钨的氮化物作为个体层材料,利用超高真空射频磁控溅射系统制备ZrN、WN及一系列的ZrN/WN多层薄膜.通过XRD,SEM和纳米力学测试系统分析了该体系合成中调制周期与ZrN、WN单层厚度比例(tZrN/tWN)对多层膜结构与机械性能的影响.结果表明:大部分多层膜的纳米硬度与弹性模量值都高于两种个体材料硬度的平均值;当调制周期Λ=30nm,tZrN:tWN=2:3时,结晶出现多元化,多层膜体系的硬度、应力以及弹性模量均达到最佳效果.多层膜的机械性能改善明显与其多层结构和多晶结构有直接的联系.

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材料期刊网

ZrN/WN纳米多层膜的结构与性能研究

Structure and property of nanoscale ZrN/WN multilayered coatings

参考文献