在多层压电器件的研制过程中,为实现压电陶瓷和Ag/Pd内电极的共烧结,本文对中温1100~1140℃范围烧成的PZN-PZ-PT系压电陶瓷的电性能进行了研究,结果表明,保温时间对该组成的压电介电性能有重要的影响,随保温时间的延长,d33从420×10-12C/N增加到 560×10-12C/N, εT33从 2180增加到 2900。
In order to realize the co-sintering with Ag/Pd electrodes in multilayer devices, PZNPZT piezoelectric ceramics were prepared by a conventional technique in the sintering temperature range from 1100℃ to 1140℃ and their piezoelectric and dielectric properties were carefully studied. The results show that soaking time is the most important factor concerning with piezoelectric and dielectric properties, d33 increases from 420× 10-12C/N to 560× 10-12C/N and εT33 increases from 2100 to 2900 with the increase of soaking time.
参考文献
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