太阳能级硅棒在切割生产硅晶片过程中会产生大量的切割废料.概述了废料中切割液和碳化硅回收技术的进展,重点介绍和分析了价值更高的硅与碳化硅微粉分离回收技术的特点度现状,并比较各种方法的优缺点,同时结合自身的课题研究,提出了新的解决思路.分析认为先通过离心、浮选等方法对切割废料初步提纯后再经高温热处理或合金化等方法将其进一步分离,是较有前景的回收技术.
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