为了提高MoS2薄膜在室温潮湿大气条件下的摩擦磨损性能,通过磁控反应溅射制备了MoS2/Ti/C复合薄膜.采用能谱仪(EDS)、X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)对薄膜的成分、相组成和形貌进行表征,采用纳米压痕仪测试薄膜的结合力、纳米压痕硬度,采用多功能微摩擦磨损试验机测试薄膜的摩擦系数,并采用真彩色高分辨率共聚焦显微镜观察薄膜的磨损形貌.结果表明:与MoS2薄膜相比,含非晶态Ti和C的MoS2/Ti/C复合薄膜的(002)滑移面平行于基体表面生长,不含(100)面,结构致密,与基体的结合力提高了7.05倍,纳米压痕硬度提高了7.11倍;在室温潮湿大气条件下,MoS2/Ti/C复合薄膜比Mos2薄膜具有更低的摩擦系数和更优异的耐磨性能,平均摩擦系数为0.103,磨损率为9.67×10(-7)mm3/(N·m).
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