本文借鉴人体内呼吸循环系统的分形结构,利用微电子机械光刻加工工艺,设计制造了一套新型分形树状微通道微电子芯片散热器.散热器的初始通道长10mm,水力直径为48.1 μm,分形维数D=2,循环次数m=4.实验测试结果表明,分形网络在提高了散热容量的同时还降低了泵功消耗,热有效性大大高于平行通道散热器,且与理论预测结果基本吻合.
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