利用射频磁控溅射法结合后退火工艺在LaAlO3 (100)衬底上制备了La0.4 Nd0.1 Sr0.5 MnO3 (LNSMO)一系列薄膜样品.通过X射线衍射仪(XRD)、原子力显微镜(AFM)、光电子能谱(XPS)、四探针法对其结构及性质进行了测试.结果表明,薄膜在700 ～900℃温度区间退火形成单相的赝立方钙钛矿结构.退火温度不同导致薄膜中氧含量发生变化并且对晶粒的尺寸也有很大影响.经过850℃退火的薄膜样品,在室温300 K,磁场为1.5T的条件下,磁电阻达到24.9％.
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