BST铁电薄膜具有优异的介电性能,电极材料特别是底电极材料,影响并决定BST薄膜的电学及介电行为,选择合适的电极材料对BST薄膜的性能至关重要,本文综述了电极材料对BST薄膜结构和介电性能的影响以及此方面的最新研究成果.
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