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以RuCl3·2H2O水溶液为电沉积液,通过恒流电沉积法在钽箔上电沉积一层RuO2·nH2O薄膜;研究了电沉积液初始pH值对制备RuO2·nH2O薄膜的影响.分别采用SEM、EDS、XRD、粒度分析仪(DELSA 440SX analyzer control)对薄膜的形貌、薄膜元素、溶胶的Zeta电位及薄膜的物相进行观察与测试.结果表明,电沉积液初始pH值越高,RuO2·nH2O薄膜越疏松,龟裂纹越大,与基体结合力也越差.初始pH值为2.3时,薄膜的孔隙率最佳,综合性能指标最好.

参考文献

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