采用阴极电沉积法,以Zn(NO3)2水溶液为电解液,在透明导电玻璃ITO衬底上制备了ZnO薄膜,用X射线衍射仪(XRD)和扫描电子显微镜(SEM)分析了ZnO薄膜的微纳结构和表面形貌.用Fluoromax-P型荧光光谱仪测量了样品的室温光致发光光谱,观察到550hm处的黄绿光发射峰,认为与样品中由导带到氧填隙引起的浅受主能级的电子跃迁有关.对样品进行500℃真空退火,研究了退火前后薄膜的结构及导电性能的变化.结果表明,退火处理使薄膜的均匀性和结晶质量得到改善,导电性明显增强.此外,还观察了薄膜的阴极射线发光.
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