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为有效缩短脉冲激光烧蚀制备有机硅聚合物聚二苯基硅亚甲基硅烷(Polydiphenylsilylenemethyle,PDPhSM)基纳米复合薄膜工艺中繁琐的试验过程,本文将用径向基函数(Radial BasisFunction,RBF)人工神经网络对聚合物PDPhSM基纳米复合薄膜的制备工艺与聚合效率之间的关系进行建模;讨论了激光能量密度、环境压强、靶衬距离、沉积时间和聚合效率之间的关系.在此基础上.采用粒子群(Particle Swarm Optimization,PSO)算法对其进行工艺优化,200代以后,粒子素质明显提高,k值趋近于0,群体达到了最优,工艺参数的优化结果较为满意.从而为薄膜材料工艺优化研究探索了一条崭新的途径.

参考文献

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