利用多靶磁控溅射法制备了金纳米颗粒分散氧化物薄膜,其分散颗粒的体积分数和平均直径分别为3%～65%和10nm～30nm.吸收光谱研究表明,Au/SiO2薄膜在560nm波长附近有明显的表面等离子共振吸收峰,吸收峰的强度随Au含量的增加而增强,Au含量在37%的附近,Au/SiO2薄膜在560 nm波长处表现的吸收峰呈最大的吸收强度.当Au分散颗粒的含量超过了其分散限度后,吸收峰的强度随Au含量的增加而减弱.用Mie散射理论对吸收光谱进行了模拟,得到了与实验结果一致的表面等离子共振吸收峰.
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