采用多周期磁控溅射单质靶Cu-Sn-Zn制备CZTS薄膜太阳电池.多周期包含两周期和四周期,同时与单周期制备的CZTS薄膜电池作对比.通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)、能谱仪(EDS)和拉曼光谱仪(Raman)对不同周期得到的CZTS薄膜的晶体性质、表面样貌、化学成分等性质进行分析研究.分析结果显示,多周期制备的CZTS薄膜晶体质量要比单周期的好,表面均匀致密.重要的是四周期溅射制备的CZTS薄膜是研究的最佳实验组.最终把不同周期得到的CZTS薄膜制备成完整的器件结构,得到的太阳电池效率分别是:单周期2.64%,两周期3.01%,四周期3.36%.
CZTS thin film solar cells were fabricated by magnetron sputtering multi-period Cu-Sn-Zn precursors.Multi-period includes double periods and four periods, meanwhile multi-period compared with CZTS thin films prepared by single period.The crystal structure, morphology, chemical composition and phase purity of CZTS thin film prepared by different periods were characterized by X Ray Diffraction(XRD), scanning electron microscopy(SEM) equipped with an energy dispersive spectrometer(EDS) and Raman spectroscopy.The results reveal that the crystal quality of CZTS thin film prepared by multi-period is better than that of single period, especially having uniform and compact surface.The most important is that the CZTS thin films prepared by four periods sputtering are the better experiment group in this paper.Finally, complete device structures were fabricated using CZTS thin film with different sputtering periods, and 2.64% efficiency of CZTS by single period, 3.01% efficiency by double periods and 3.36% efficiency by four periods were obtained, respectively.
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