材料期刊网

本文采用俄罗斯UVN 0.5D2I离子束辅助电弧离子镀沉积设备，在高速钢W18Cr4V基材上沉积TiN膜层。研究了N离子束轰击能量对膜层表面形貌、相结构、显微硬度的影响。结果表明：N离子束辅助轰击，能够有效地减少和降低膜层表面“大颗粒“的数量和尺寸， 消除了膜层中较软Ti2N相，得到了单一的TiN相，随着轰击能量的增加，TiN相结构不发生变化，TiN（111）取向逐渐减弱，而（200）取向逐渐增强。N离子束辅助轰击能量的增加，提高了膜层的显微硬度。

TiN coatings were deposited on high-speed steel W18Cr4V substrate by Russia UVN 0.5D2I ion beam assisted arc ion plating .The effects of N ion beam bombarding on surface morphology, phase structure and micro hardness of deposited coatings were studied by change the energy of N ion beam bombarded. The experimental results show that the size of large particles on coatings surface was decreased obviously by N ion beam assisting bombardment, and surface morphology was optimized. Unitary TiN phase was obtained and softer Ti2N phases were eliminated by N ion beam assisted bombard. As the energy of bombard increased, TiN (111) crystal orientation gradually reduced and (200) gradually enhanced. The micro hardness of coatings reinforced too.