以热氧化硅片为衬底,以溶液溶解和真空蒸镀两种方法,在不同温度下制备有机半导体材料并五苯(pentacene)薄膜.用原子力显微镜(AFM)分析了薄膜的形貌,讨论了影响薄膜质量的各种因素.
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