采用磁控溅射技术,在高速钢基材上沉积了不同Y含量的CrAlYN涂层,进行了900℃下lh高温氧化试验.通过SEM、EDS、XRD和纳米压痕仪等对涂层元素组成、纳米硬度、弹性模量以及热处理前后的表面形貌和物相组成进行了表征.研究了Y含量对CrAlYN涂层硬度,弹性模量、物相组成和高温抗氧化性能的影响.结果表明:加入Y后涂层没有新的物相形成,但是CrAlN相的衍射峰取向由(200)向(111)转变.与不添加Y的CrAlN涂层相比,Y含量0.41 at％时,涂层的硬度、弹性模量和900℃高温抗氧化性能显著改善.Y含量2.75 at％和3.94 at％时,涂层的综合性能降低.
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