放肩是直拉法生长硅单晶保持无位错生长的过程,是晶体能够顺利进入等径生长的关键.生产实践中发现,在放肩前段经常出现液流线切人晶体随之变晶的现象.本文提出了放肩前期的变晶转拉晶工艺,采用有限元数值模拟的方法计算出熔体热对流及温度分布,给出了固液界面附近熔体中的流速变化规律,解释了液流线的成因,通过仿真结果和拉晶实验结果表明该方法的有效性.
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