分别采用浸渍法和电镀法对多孔硅薄膜进行了锌掺杂.用扫描探针显微镜研究了多孔硅掺杂前后的表面形貌,用荧光分光光度计分析了样品的光致发光特性,发现锌掺杂增强了多孔硅的蓝光发射,且在420nm附近出现了一个小峰,样品放置一个月后,发光强度和峰位变化很小.红外吸收谱表明锌掺杂后,Si-O-Si键、Si2O-SiH键、H2Si-O2键的振动增强,且引入了Zn-O键.锌掺杂多孔硅发射蓝光是由于掺杂后多孔硅无定形程度增大,应力增大,表面进一步被氧化,使纳米硅粒中激发的电子-空穴对在SiOx层中或纳米硅粒与SiOx层界面的发光中心复合发光造成的,420nm处的发光峰是由锌填隙引起浅施主能级上的电子到价带跃迁造成的,同时分析了电镀法掺杂锌的优越性.
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