分别从热力学过程、化学过程、工艺过程3个方面综述了MOD(金属有机物热分解)成膜方法,重点论述了MOD成膜的推动力和热处理工艺中薄膜结晶状态的改变.在此基础上对薄膜的性能进行了控制和优化.关注了MOD成膜法的最新进展,包括BT和PZT纳米线的制备、PT纳米点的制备,并对MOD与Sol-gel进行了系统性的比较.
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