使用射频磁控溅射法在石英衬底上制备quartz/ZnO/TiNi及quartz/TiNi/ZnO复合薄膜结构,利用XRD、SEM划痕仪等测试方法研究了复合薄膜的相结构、微观组织、力学性能.利用DMA分别研究了quartz/TiNi与quartz/ZnO/TiNi复合结构的阻尼性能随振动频率及振幅的变化规律.结果表明,前者频率响应范围在10 Hz以内,后者响应范围达到20 Hz:前者的临界外加激振电压仅为0.6 V,后者的临界外加激振电压达到1.0 V.阻尼性能测试表明,quartz/ZnO/TiNi复合结构的阻尼性能优于quartz/TiNi复合结构.由划痕仪测得两种复合薄膜结构与基体的临界结合力分别为45.75和40.15N.
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