采用溶胶-凝胶法和浸渍提拉法成功制备了Al掺杂ZnO薄膜(以下简称AZO薄膜).用X射线衍射仪(XRD)、场发射扫描电镜(FE-SEM)、分光光度计、霍尔(Hall)测量仪,分别研究了不同Al的掺杂浓度对薄膜的结晶性能、微观形貌和光电性能的影响,探讨了Al的掺杂机理.结果表明,Al的掺杂存在最佳值,当Al掺杂摩尔浓度为5%时,AZO薄膜的结晶性能、微观形貌和光电性能最佳,其透光率在80%以上,电阻率为2.1×102Ω·cm,霍尔迁移率为0.23cm2/V·s,载流子浓度为7.81×1014cm-3.
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