介绍了一种新的液相法薄膜制备工艺-SILAR法(连续离子层吸附反应法),该方法设备简单,成本低廉,成膜质量好.解释了它的非均相薄膜生长机理,对它的工艺参数影响以及研究应用情况进行了综合评述.指出了研究发展前景.
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