TeOx thin films were prepared by vacuum evaporation of TeO2 powder. Structural characteristic and surface morphology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a two-component system comprising Te particles dispersed in an amorphous TeO¬2 matrix. The dispersed Te particles were in a crystalline state. The TeO¬x films showed a finely granular structure and a rough surface. Results of the static recording test showed that the TeO¬x films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeO¬x films were suitable for using as a blue-green wavelength high density optical storage medium.
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