ZnO薄膜是一种具有优良的压电、光电、气敏、压敏等性质的材料.ZnO薄膜的制备方法多样,薄膜的性质取决于不同的掺杂组分,并与制备工艺紧密相关.简述了ZnO薄膜的制备方法与基本性质与应用,分析了ZnO薄膜研究、应用与开发现状,展望了产业化发展前景.
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