用朗缪尔单探针技术对离子渗金属中的等离子体参数进行了诊断,讨论工艺参数对等离子体参数的影响.结果表明,随着工件阴极电压、源极电压和气压的增加,等离子体密度增大.利用等离子体参数结合放电特征对工艺参数进行了优化限定.讨论了等离子体参数对渗层成分的影响.
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