采用多元电子束物理气相沉积法在｛001｝ LAO衬底上制备了YBCO薄膜,采用X射线衍射分析了其取向和孪晶结构,结果表明,薄膜中除了8％C取向的四方相外；其余为正交相,而正交相中存在27％的a取向,3％的b取向以及62％的C取向,且C取向晶粒存在面内90°±0.81°＜110＞孪晶.四方到正交相变不完全引起四方相残留、局部微环境差异、相变应力以及取向性薄膜相变弹性应变能的方向性等是引起正交相多取向以及孪晶的主要原因.
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