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深紫外相干光源对于光刻技术、光电子能谱仪、激光精密机械加工等均具有十分重要的意义.本文将系统地阐述可产生深紫外谐波光输出的非线性光学晶体是如何被发现的,这些晶体的基本线性、非线性光学性质和使用它们产生深紫外谐波光的方法.最后还简单介绍深紫外谐波光的几个典型例子.

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