采用物理气相沉积(PVD)技术,在单面抛光的缺口拉伸试样上生长Ti和TiN薄膜,采用扫描电镜(SEM)观察膜面以0.05mm/min变形速度拉伸变形行为并记录和确定膜的开裂和脱落时的临界伸长量δ_c和δ_s,用来评价薄膜的粘附性和塑韧性;相同的膜/基体系进行划痕实验,确定其临界载荷L_c并评价膜的粘附性,结果表明前者较好地说明了膜与基体粘附性和膜自身的塑韧性,后者只能评价膜的粘附性,而且两种方法评价粘附性有良好的一致性,此外还比较了几种涂层样品的拉伸曲线并讨论了薄膜的塑韧性和粘附性对基材屈服极限的影响,引入了粘附功判据
Evaluation of adhesion of PVD Ti and TiN films on A_3 steel was carried out bya newly developed method, so called constant rate pulling test (CRPT) at 0.05mm/min, underSEM observation simultaneously. As the criterion, the critical cracking or spalling elongationof the film/substrate system on the one-sided polishing notched tensile specimen may be de-termined, respectively, to evaluate the plasticity and adherence of the film to substrate. Theconventional scratch test was also made for evaluation of the adhesion of films of the same sys-tems. Both give the coordinate assessment for all of the systems. In addition, the influence ofadhesion of the films to the substrate on ultimate YS of substrate material was discussed andanother criterion for adhesion assessment was proposed.
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