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  4. I-Line光刻胶材料的研究进展

影像科学与光化学 , 2012, 30(2): 81-90.

I-Line光刻胶材料的研究进展

郑金红 1,

1.北京科华微电子材料有限公司,北京101312

关键词： i-line , 光刻胶 , 酚醛树脂 , 感光剂 , 溶解促进剂

Evolution and Progress of I-Line Photoresist Materials

酚醛树脂-重氮萘醌正型光刻胶由于其优异的光刻性能,在g-line(436nm)、i-line(365 nm)光刻中被广泛使用.g-line光刻胶胶、i-line光刻胶,两者虽然都是用线型酚醛树脂做成膜树脂,重氮萘醌型酯化物作感光剂,但当曝光波长从g-line发展到i-line时,为适应对应的曝光波长以及对高分辨率的追求,酚醛树脂及感光剂的微观结构均有变化.在i-line光刻胶中,酚醛树脂的邻-邻′相连程度高,感光剂酯化度高,重氮萘醌基团间的间距远.溶解促进剂是i-line光刻胶的一个重要组分,本文对其也进行了介绍.

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