采用适当热处理工艺得到择优取向Ni片,通过溶胶凝胶方法制备〈100〉择优取向BST薄膜,并对薄膜的铁电性及漏电流特性进行了初步研究.结果表明:以三氟乙酸代替冰醋酸、以异丙醇钛代替钛酸四丁酯更易得到〈100〉取向BST薄膜,该薄膜在还原气氛中(H2/N2=3/97)热处理后得到〈100〉择优取向BST薄膜.该技术在集成电容、介电可调器件、超导材料缓冲层方面有潜在的应用.
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