介绍了国内外聚氯代对二甲苯薄膜(PC膜)聚集态结构的研究动态,包括PC膜聚集态结构的表征,随沉积条件、温度变化的演变及其与宏观性能的关系.对PC膜聚集态结构的表征主要局限于晶胞结构、细观形貌.在沉积条件中,沉积压力和温度是影响PC膜聚集态结构的主要因素,同时PC膜在高温下会发生晶相转换以及结晶度的变化,而其聚集态结构的差异会对PC膜的透湿性、力学性能及其表面性能产生显著影响.针对PC膜面向微器件的应用,进一步提出在其聚集态结构方面有待深入研究的问题.
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